Characteristics of PMN-PZT ferroelectric electron emitters with three-dimensional emission sites formed by chemical etching

  • Tomohiko Sugiyama
  • , Iwao Ohwada
  • , Tsutomu Nanataki
  • , Yukihisa Moriguchi
  • , Osamu Eryu
  • , Masaya Ichimura
  • , Manabu Gomi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Pb(Mg1/3N2/3)O3-PbZrO3- PbTiO3 (PMN-PZT) ferroelectric electron emitters with a novel electrode structures were formed by photolithography and chemical etching to investigate their electron emission characteristics. For the electron emitter formed with the most suitable etching time, the electron emission density was 17 nC/ cm2. An electric potential distribution was simulated to clarify the effects of the vacuum gap, and results confirmed that the vacuum gap produces an electric field that leads electrons from the ferroelectric surface to the surrounding space.

Original languageEnglish
Article number032210
JournalJournal of Vacuum Science and Technology B
Volume29
Issue number3
DOIs
Publication statusPublished - 05-2011
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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