Abstract
Pb(Mg1/3N2/3)O3-PbZrO3- PbTiO3 (PMN-PZT) ferroelectric electron emitters with a novel electrode structures were formed by photolithography and chemical etching to investigate their electron emission characteristics. For the electron emitter formed with the most suitable etching time, the electron emission density was 17 nC/ cm2. An electric potential distribution was simulated to clarify the effects of the vacuum gap, and results confirmed that the vacuum gap produces an electric field that leads electrons from the ferroelectric surface to the surrounding space.
| Original language | English |
|---|---|
| Article number | 032210 |
| Journal | Journal of Vacuum Science and Technology B |
| Volume | 29 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 05-2011 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry