Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

Masato Futagawa; Shin Ogasahara; Tatsumi Ito; Mitsuru Komatsu; Yasushi Fuwa; Harutoyo Hirano; Ippei Akita; Kenichiro Kusano; Minoru Watanabe

doi:10.1109/TRANSDUCERS.2017.7994253

Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

Masato Futagawa
, Shin Ogasahara
, Tatsumi Ito
, Mitsuru Komatsu
, Yasushi Fuwa
, Harutoyo Hirano
, Ippei Akita
, Kenichiro Kusano
, Minoru Watanabe

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.

Original language	English
Title of host publication	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1136-1139
Number of pages	4
ISBN (Electronic)	9781538627310
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994253
Publication status	Published - 26-07-2017
Externally published	Yes
Event	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China Duration: 18-06-2017 → 22-06-2017

Publication series

Name	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	18-06-17 → 22-06-17

All Science Journal Classification (ASJC) codes

Chemical Health and Safety
Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2017.7994253

Cite this

Futagawa, M., Ogasahara, S., Ito, T., Komatsu, M., Fuwa, Y., Hirano, H., Akita, I., Kusano, K., & Watanabe, M. (2017). Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1136-1139). Article 7994253 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994253

Futagawa, Masato ; Ogasahara, Shin ; Ito, Tatsumi et al. / Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1136-1139 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

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title = "Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics",

abstract = "A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 \% or less.",

author = "Masato Futagawa and Shin Ogasahara and Tatsumi Ito and Mitsuru Komatsu and Yasushi Fuwa and Harutoyo Hirano and Ippei Akita and Kenichiro Kusano and Minoru Watanabe",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",

year = "2017",

month = jul,

day = "26",

doi = "10.1109/TRANSDUCERS.2017.7994253",

language = "English",

series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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address = "United States",

}

Futagawa, M, Ogasahara, S, Ito, T, Komatsu, M, Fuwa, Y, Hirano, H, Akita, I, Kusano, K & Watanabe, M 2017, Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994253, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers Inc., pp. 1136-1139, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 18-06-17. https://doi.org/10.1109/TRANSDUCERS.2017.7994253

Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. / Futagawa, Masato; Ogasahara, Shin; Ito, Tatsumi et al.
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1136-1139 7994253 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

AU - Futagawa, Masato

AU - Ogasahara, Shin

AU - Ito, Tatsumi

AU - Komatsu, Mitsuru

AU - Fuwa, Yasushi

AU - Hirano, Harutoyo

AU - Akita, Ippei

AU - Kusano, Kenichiro

AU - Watanabe, Minoru

PY - 2017/7/26

Y1 - 2017/7/26

N2 - A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.

AB - A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.

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DO - 10.1109/TRANSDUCERS.2017.7994253

M3 - Conference contribution

AN - SCOPUS:85029387900

T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

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BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 18 June 2017 through 22 June 2017

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Futagawa M, Ogasahara S, Ito T, Komatsu M, Fuwa Y, Hirano H et al. Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1136-1139. 7994253. (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/TRANSDUCERS.2017.7994253

Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

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