Abstract
A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.
Original language | English |
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Pages (from-to) | 383-388 |
Number of pages | 6 |
Journal | Sensors and Actuators, A: Physical |
Volume | 271 |
DOIs | |
Publication status | Published - 01-03-2018 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering