Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics

Masato Futagawa; Shin Ogasahara; Tatsumi Ito; Mitsuru Komatsu; Yasushi Fuwa; Harutoyo Hirano; Ippei Akita; Kenichiro Kusano; Minoru Watanabe

doi:10.1016/j.sna.2017.12.022

Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics

Masato Futagawa
, Shin Ogasahara
, Tatsumi Ito
, Mitsuru Komatsu
, Yasushi Fuwa
, Harutoyo Hirano
, Ippei Akita
, Kenichiro Kusano
, Minoru Watanabe

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.

Original language	English
Pages (from-to)	383-388
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	271
DOIs	https://doi.org/10.1016/j.sna.2017.12.022
Publication status	Published - 01-03-2018
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2017.12.022

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title = "Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics",

abstract = "A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10\% or less. The sensor could detect the change of water content in the slope of mountain when it rained.",

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AU - Futagawa, Masato

AU - Ogasahara, Shin

AU - Ito, Tatsumi

AU - Komatsu, Mitsuru

AU - Fuwa, Yasushi

AU - Hirano, Harutoyo

AU - Akita, Ippei

AU - Kusano, Kenichiro

AU - Watanabe, Minoru

PY - 2018/3/1

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AB - A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.

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JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

ER -

Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics

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