TY - GEN
T1 - Fabrication of a Stripe-Gate Type pH Sensor for Inhibition of Drift in pH Measurement for Long-Term Soil Monitoring
AU - Futagawa, Masato
AU - Uemura, Keisuke
AU - Oishi, Ryuta
AU - Ota, Satoshi
AU - Hirano, Harutoyo
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/6
Y1 - 2019/6
N2 - An ISFET-type pH sensor with stripe gate electrodes to inhibit the drift was fabricated for long-term pH measurement. The line and space patterns of stripe gate electrodes were fabricated under the pH sensing membrane in a channel area of the FET. The voltage was applied to the gate electrodes to suppress the diffusions of the anions from the object solution in the sensing membrane. We confirmed the inhibition of the drift using the gate electrodes.
AB - An ISFET-type pH sensor with stripe gate electrodes to inhibit the drift was fabricated for long-term pH measurement. The line and space patterns of stripe gate electrodes were fabricated under the pH sensing membrane in a channel area of the FET. The voltage was applied to the gate electrodes to suppress the diffusions of the anions from the object solution in the sensing membrane. We confirmed the inhibition of the drift using the gate electrodes.
UR - http://www.scopus.com/inward/record.url?scp=85071921199&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85071921199&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2019.8808728
DO - 10.1109/TRANSDUCERS.2019.8808728
M3 - Conference contribution
AN - SCOPUS:85071921199
T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
SP - 1357
EP - 1360
BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Y2 - 23 June 2019 through 27 June 2019
ER -