Optical centers and oxygen in Er-ion implanted silicon

Kenshiro Nakashima; Osamu Eryu; Osamu Iioka; Toshitake Nakata; Masanori Watanabe

doi:10.1016/S0168-583X(96)00977-9

Optical centers and oxygen in Er-ion implanted silicon

Kenshiro Nakashima
, Osamu Eryu
, Osamu Iioka
, Toshitake Nakata
, Masanori Watanabe

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Systematic photoluminescence (PL) studies of silicon co-implanted with erbium and oxygen are presented. We find a strong dependence of PL spectra on the ratio of O/Er. For samples with Er peak concentration of 1 × 10¹⁹ cm^-3, annealed at 800°C, the well-defined Er luminescence spectra arising from Er³⁺-centers with cubic site symmetry have been observed to dominate the PL spectra in the O/Er ratio of one to two. In addition, Rutherford backscattering spectrometry (RBS) and channeling measurements revealed significant recovery of the crystal quality in the same O/Er ratio. In the O/Er ratio larger than 5, other lines emerge in the PL spectrum, and the PL from cubic symmetry centers decreases in intensity. We suggest that the origins of optical centers with cubic site symmetry are Er³⁺ ions in tetrahedral sites coupled with O, while oxygen aggregation around Er ions becomes predominant in the O/Er ratio larger than 5.

Original language	English
Pages (from-to)	475-478
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	127-128
DOIs	https://doi.org/10.1016/S0168-583X(96)00977-9
Publication status	Published - 05-1997
Externally published	Yes

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Instrumentation

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10.1016/S0168-583X(96)00977-9

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@article{eaf554d5d3614355ac352a7668e0b3c1,

title = "Optical centers and oxygen in Er-ion implanted silicon",

abstract = "Systematic photoluminescence (PL) studies of silicon co-implanted with erbium and oxygen are presented. We find a strong dependence of PL spectra on the ratio of O/Er. For samples with Er peak concentration of 1 × 1019 cm-3, annealed at 800°C, the well-defined Er luminescence spectra arising from Er3+-centers with cubic site symmetry have been observed to dominate the PL spectra in the O/Er ratio of one to two. In addition, Rutherford backscattering spectrometry (RBS) and channeling measurements revealed significant recovery of the crystal quality in the same O/Er ratio. In the O/Er ratio larger than 5, other lines emerge in the PL spectrum, and the PL from cubic symmetry centers decreases in intensity. We suggest that the origins of optical centers with cubic site symmetry are Er3+ ions in tetrahedral sites coupled with O, while oxygen aggregation around Er ions becomes predominant in the O/Er ratio larger than 5.",

author = "Kenshiro Nakashima and Osamu Eryu and Osamu Iioka and Toshitake Nakata and Masanori Watanabe",

year = "1997",

month = may,

doi = "10.1016/S0168-583X(96)00977-9",

language = "English",

volume = "127-128",

pages = "475--478",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Optical centers and oxygen in Er-ion implanted silicon

AU - Nakashima, Kenshiro

AU - Eryu, Osamu

AU - Iioka, Osamu

AU - Nakata, Toshitake

AU - Watanabe, Masanori

PY - 1997/5

Y1 - 1997/5

N2 - Systematic photoluminescence (PL) studies of silicon co-implanted with erbium and oxygen are presented. We find a strong dependence of PL spectra on the ratio of O/Er. For samples with Er peak concentration of 1 × 1019 cm-3, annealed at 800°C, the well-defined Er luminescence spectra arising from Er3+-centers with cubic site symmetry have been observed to dominate the PL spectra in the O/Er ratio of one to two. In addition, Rutherford backscattering spectrometry (RBS) and channeling measurements revealed significant recovery of the crystal quality in the same O/Er ratio. In the O/Er ratio larger than 5, other lines emerge in the PL spectrum, and the PL from cubic symmetry centers decreases in intensity. We suggest that the origins of optical centers with cubic site symmetry are Er3+ ions in tetrahedral sites coupled with O, while oxygen aggregation around Er ions becomes predominant in the O/Er ratio larger than 5.

AB - Systematic photoluminescence (PL) studies of silicon co-implanted with erbium and oxygen are presented. We find a strong dependence of PL spectra on the ratio of O/Er. For samples with Er peak concentration of 1 × 1019 cm-3, annealed at 800°C, the well-defined Er luminescence spectra arising from Er3+-centers with cubic site symmetry have been observed to dominate the PL spectra in the O/Er ratio of one to two. In addition, Rutherford backscattering spectrometry (RBS) and channeling measurements revealed significant recovery of the crystal quality in the same O/Er ratio. In the O/Er ratio larger than 5, other lines emerge in the PL spectrum, and the PL from cubic symmetry centers decreases in intensity. We suggest that the origins of optical centers with cubic site symmetry are Er3+ ions in tetrahedral sites coupled with O, while oxygen aggregation around Er ions becomes predominant in the O/Er ratio larger than 5.

UR - https://www.scopus.com/pages/publications/0031547649

UR - https://www.scopus.com/pages/publications/0031547649#tab=citedBy

U2 - 10.1016/S0168-583X(96)00977-9

DO - 10.1016/S0168-583X(96)00977-9

M3 - Article

AN - SCOPUS:0031547649

SN - 0168-583X

VL - 127-128

SP - 475

EP - 478

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

Optical centers and oxygen in Er-ion implanted silicon

Abstract

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