Optical properties of amorphous carbon films implanted with nitrogen

K. Abe; O. Eryu

doi:10.1016/j.nimb.2005.08.133

Optical properties of amorphous carbon films implanted with nitrogen

K. Abe, O. Eryu

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Effects of nitrogen implantation on optical properties of amorphous carbon (a-C) films have been investigated. The optical (Tauc) gap of the films decreases with increasing ion dose due to structural modification during ion implantation. The photoluminescence (PL) spectrum for the as-deposited film has broad peak centered at 2.22 eV. Nitrogen irradiation leads to a blue shift of the PL peak and decrease of the PL peak width. The PL peak centered at 2.34 eV is obtained from the films implanted with nitrogen at the dose of 1 × 10¹⁵ cm^-2. Ion implantation can control PL properties of the films.

Original language	English
Pages (from-to)	637-639
Number of pages	3
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	242
Issue number	1-2
DOIs	https://doi.org/10.1016/j.nimb.2005.08.133
Publication status	Published - 01-2006
Externally published	Yes

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Instrumentation

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10.1016/j.nimb.2005.08.133

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title = "Optical properties of amorphous carbon films implanted with nitrogen",

abstract = "Effects of nitrogen implantation on optical properties of amorphous carbon (a-C) films have been investigated. The optical (Tauc) gap of the films decreases with increasing ion dose due to structural modification during ion implantation. The photoluminescence (PL) spectrum for the as-deposited film has broad peak centered at 2.22 eV. Nitrogen irradiation leads to a blue shift of the PL peak and decrease of the PL peak width. The PL peak centered at 2.34 eV is obtained from the films implanted with nitrogen at the dose of 1 × 1015 cm-2. Ion implantation can control PL properties of the films.",

keywords = "Amorphous carbon, Ion implantation, Optical gap, Photoluminescence",

author = "K. Abe and O. Eryu",

year = "2006",

month = jan,

doi = "10.1016/j.nimb.2005.08.133",

language = "English",

volume = "242",

pages = "637--639",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

number = "1-2",

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TY - JOUR

T1 - Optical properties of amorphous carbon films implanted with nitrogen

AU - Abe, K.

AU - Eryu, O.

PY - 2006/1

Y1 - 2006/1

N2 - Effects of nitrogen implantation on optical properties of amorphous carbon (a-C) films have been investigated. The optical (Tauc) gap of the films decreases with increasing ion dose due to structural modification during ion implantation. The photoluminescence (PL) spectrum for the as-deposited film has broad peak centered at 2.22 eV. Nitrogen irradiation leads to a blue shift of the PL peak and decrease of the PL peak width. The PL peak centered at 2.34 eV is obtained from the films implanted with nitrogen at the dose of 1 × 1015 cm-2. Ion implantation can control PL properties of the films.

AB - Effects of nitrogen implantation on optical properties of amorphous carbon (a-C) films have been investigated. The optical (Tauc) gap of the films decreases with increasing ion dose due to structural modification during ion implantation. The photoluminescence (PL) spectrum for the as-deposited film has broad peak centered at 2.22 eV. Nitrogen irradiation leads to a blue shift of the PL peak and decrease of the PL peak width. The PL peak centered at 2.34 eV is obtained from the films implanted with nitrogen at the dose of 1 × 1015 cm-2. Ion implantation can control PL properties of the films.

KW - Amorphous carbon

KW - Ion implantation

KW - Optical gap

KW - Photoluminescence

UR - https://www.scopus.com/pages/publications/28544434172

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U2 - 10.1016/j.nimb.2005.08.133

DO - 10.1016/j.nimb.2005.08.133

M3 - Article

AN - SCOPUS:28544434172

SN - 0168-583X

VL - 242

SP - 637

EP - 639

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 1-2

ER -

Optical properties of amorphous carbon films implanted with nitrogen

Abstract

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