Quality improvement of X-ray Ct images by estimation of the mechanical misalignment in a projection image using an iterative method

Kenji Noguchi, Satoshi Takahashi, Daisuke Suzuki, Atsushi Teramoto

Research output: Contribution to journalArticle

Abstract

An X-ray computed tomography (CT) apparatus is required for the inspection of semiconductor packages to detect fine voids with high accuracy. However, obtaining high-quality CT images stably is difficult because of object misalignment. In this paper, we propose a method for improving the X-ray CT image quality by estimating the mechanical misalignment of each projection image. The estimation is conducted by using an iterative method based on the characteristic features obtained from the reconstructed image. In experiments, we verified the effectiveness of proposed method by using projection images with simulated misalignments added. The results indicated that the proposed method may be useful for improving the quality of CT imaging.

Original languageEnglish
Pages (from-to)213-219
Number of pages7
JournalIEEJ Transactions on Industry Applications
Volume137
Issue number3
DOIs
Publication statusPublished - 01-01-2017

Fingerprint

Iterative methods
Tomography
X rays
Image quality
Inspection
Semiconductor materials
Imaging techniques
Experiments

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

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abstract = "An X-ray computed tomography (CT) apparatus is required for the inspection of semiconductor packages to detect fine voids with high accuracy. However, obtaining high-quality CT images stably is difficult because of object misalignment. In this paper, we propose a method for improving the X-ray CT image quality by estimating the mechanical misalignment of each projection image. The estimation is conducted by using an iterative method based on the characteristic features obtained from the reconstructed image. In experiments, we verified the effectiveness of proposed method by using projection images with simulated misalignments added. The results indicated that the proposed method may be useful for improving the quality of CT imaging.",
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Quality improvement of X-ray Ct images by estimation of the mechanical misalignment in a projection image using an iterative method. / Noguchi, Kenji; Takahashi, Satoshi; Suzuki, Daisuke; Teramoto, Atsushi.

In: IEEJ Transactions on Industry Applications, Vol. 137, No. 3, 01.01.2017, p. 213-219.

Research output: Contribution to journalArticle

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