Abstract
An X-ray computed tomography (CT) apparatus is required for the inspection of semiconductor packages to detect fine voids with high accuracy. However, obtaining high-quality CT images stably is difficult because of object misalignment. In this paper, we propose a method for improving the X-ray CT image quality by estimating the mechanical misalignment of each projection image. The estimation is conducted by using an iterative method based on the characteristic features obtained from the reconstructed image. In experiments, we verified the effectiveness of proposed method by using projection images with simulated misalignments added. The results indicated that the proposed method may be useful for improving the quality of CT imaging.
| Original language | English |
|---|---|
| Pages (from-to) | 213-219 |
| Number of pages | 7 |
| Journal | IEEJ Transactions on Industry Applications |
| Volume | 137 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 01-01-2017 |
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All Science Journal Classification (ASJC) codes
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering
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Quality improvement of X-ray Ct images by estimation of the mechanical misalignment in a projection image using an iterative method. / Noguchi, Kenji; Takahashi, Satoshi; Suzuki, Daisuke; Teramoto, Atsushi.
In: IEEJ Transactions on Industry Applications, Vol. 137, No. 3, 01.01.2017, p. 213-219.Research output: Contribution to journal › Article
TY - JOUR
T1 - Quality improvement of X-ray Ct images by estimation of the mechanical misalignment in a projection image using an iterative method
AU - Noguchi, Kenji
AU - Takahashi, Satoshi
AU - Suzuki, Daisuke
AU - Teramoto, Atsushi
PY - 2017/1/1
Y1 - 2017/1/1
N2 - An X-ray computed tomography (CT) apparatus is required for the inspection of semiconductor packages to detect fine voids with high accuracy. However, obtaining high-quality CT images stably is difficult because of object misalignment. In this paper, we propose a method for improving the X-ray CT image quality by estimating the mechanical misalignment of each projection image. The estimation is conducted by using an iterative method based on the characteristic features obtained from the reconstructed image. In experiments, we verified the effectiveness of proposed method by using projection images with simulated misalignments added. The results indicated that the proposed method may be useful for improving the quality of CT imaging.
AB - An X-ray computed tomography (CT) apparatus is required for the inspection of semiconductor packages to detect fine voids with high accuracy. However, obtaining high-quality CT images stably is difficult because of object misalignment. In this paper, we propose a method for improving the X-ray CT image quality by estimating the mechanical misalignment of each projection image. The estimation is conducted by using an iterative method based on the characteristic features obtained from the reconstructed image. In experiments, we verified the effectiveness of proposed method by using projection images with simulated misalignments added. The results indicated that the proposed method may be useful for improving the quality of CT imaging.
UR - http://www.scopus.com/inward/record.url?scp=85015740687&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85015740687&partnerID=8YFLogxK
U2 - 10.1541/ieejias.137.213
DO - 10.1541/ieejias.137.213
M3 - Article
AN - SCOPUS:85015740687
VL - 137
SP - 213
EP - 219
JO - IEEJ Transactions on Industry Applications
JF - IEEJ Transactions on Industry Applications
SN - 0913-6339
IS - 3
ER -