Surface characterization of 6H-SiC substrate irradiated by femtosecond laser

Reina Miyagawa; Osamu Eryu

doi:10.7567/JJAP.54.071302

Surface characterization of 6H-SiC substrate irradiated by femtosecond laser

Reina Miyagawa, Osamu Eryu

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

SiC is a promising material for high-power electronic devices and has been an increasingly attractive research subject. In this study, we focused on the surface functionalization of SiC at the atomic level using a femtosecond laser. The laser irradiation was performed in air, nitrogen gas, and vacuum ambient, and the effect of the ambient on the surface modification was discussed. When the irradiation was performed in nitrogen gas ambient, oxidation of the SiC surface decreased.

Original language	English
Article number	071302
Journal	Japanese Journal of Applied Physics
Volume	54
Issue number	7
DOIs	https://doi.org/10.7567/JJAP.54.071302
Publication status	Published - 01-07-2015
Externally published	Yes

All Science Journal Classification (ASJC) codes

General Engineering
General Physics and Astronomy

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10.7567/JJAP.54.071302

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title = "Surface characterization of 6H-SiC substrate irradiated by femtosecond laser",

abstract = "SiC is a promising material for high-power electronic devices and has been an increasingly attractive research subject. In this study, we focused on the surface functionalization of SiC at the atomic level using a femtosecond laser. The laser irradiation was performed in air, nitrogen gas, and vacuum ambient, and the effect of the ambient on the surface modification was discussed. When the irradiation was performed in nitrogen gas ambient, oxidation of the SiC surface decreased.",

author = "Reina Miyagawa and Osamu Eryu",

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AB - SiC is a promising material for high-power electronic devices and has been an increasingly attractive research subject. In this study, we focused on the surface functionalization of SiC at the atomic level using a femtosecond laser. The laser irradiation was performed in air, nitrogen gas, and vacuum ambient, and the effect of the ambient on the surface modification was discussed. When the irradiation was performed in nitrogen gas ambient, oxidation of the SiC surface decreased.

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Surface characterization of 6H-SiC substrate irradiated by femtosecond laser

Abstract

All Science Journal Classification (ASJC) codes

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