TY - GEN
T1 - Surface morphologies and optical properties of homoepitaxial ZnO grown by close-spaced chemical vapor transport
AU - Abe, Koji
AU - Tokuda, Tetsuya
AU - Banno, Yuta
AU - Eryu, Osamu
PY - 2007
Y1 - 2007
N2 - Chemical vapor transport (CVT) is studied for homoepitaxial growth on O-polar ZnO substrates. Characterization of the surface morphology, crystal quality and luminescent properties of the epilayers is presented. To increase growth rate at high temperatures, we keep a substrate close to ZnO source powder. Surface smoothness and crystal quality of epilayers are remarkably improved by increasing a substrate temperature. Smooth surfaces are observed on the epilayer grown at substrate temperatures above 920°C.
AB - Chemical vapor transport (CVT) is studied for homoepitaxial growth on O-polar ZnO substrates. Characterization of the surface morphology, crystal quality and luminescent properties of the epilayers is presented. To increase growth rate at high temperatures, we keep a substrate close to ZnO source powder. Surface smoothness and crystal quality of epilayers are remarkably improved by increasing a substrate temperature. Smooth surfaces are observed on the epilayer grown at substrate temperatures above 920°C.
UR - https://www.scopus.com/pages/publications/38549127685
UR - https://www.scopus.com/inward/citedby.url?scp=38549127685&partnerID=8YFLogxK
U2 - 10.1557/proc-1012-y03-25
DO - 10.1557/proc-1012-y03-25
M3 - Conference contribution
AN - SCOPUS:38549127685
SN - 9781558999725
T3 - Materials Research Society Symposium Proceedings
SP - 163
EP - 168
BT - 2007 MRS Spring Meeting
PB - Materials Research Society
T2 - 2007 MRS Spring Meeting
Y2 - 9 April 2007 through 13 April 2007
ER -