Characteristics of PMN-PZT ferroelectric electron emitters with three-dimensional emission sites formed by chemical etching

Tomohiko Sugiyama; Iwao Ohwada; Tsutomu Nanataki; Yukihisa Moriguchi; Osamu Eryu; Masaya Ichimura; Manabu Gomi

doi:10.1116/1.3592993

Characteristics of PMN-PZT ferroelectric electron emitters with three-dimensional emission sites formed by chemical etching

Tomohiko Sugiyama
, Iwao Ohwada
, Tsutomu Nanataki
, Yukihisa Moriguchi
, Osamu Eryu
, Masaya Ichimura
, Manabu Gomi

研究成果: ジャーナルへの寄稿 › 学術論文 › 査読

1 被引用数 (Scopus)

抄録

Pb(Mg_1/3N_2/3)O₃-PbZrO₃- PbTiO₃ (PMN-PZT) ferroelectric electron emitters with a novel electrode structures were formed by photolithography and chemical etching to investigate their electron emission characteristics. For the electron emitter formed with the most suitable etching time, the electron emission density was 17 nC/ cm2. An electric potential distribution was simulated to clarify the effects of the vacuum gap, and results confirmed that the vacuum gap produces an electric field that leads electrons from the ferroelectric surface to the surrounding space.

本文言語	英語
論文番号	032210
ジャーナル	Journal of Vacuum Science and Technology B
巻	29
号	3
DOI	https://doi.org/10.1116/1.3592993
出版ステータス	出版済み - 05-2011
外部発表	はい

All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
器械工学
プロセス化学およびプロセス工学
表面、皮膜および薄膜
電子工学および電気工学
材料化学

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title = "Characteristics of PMN-PZT ferroelectric electron emitters with three-dimensional emission sites formed by chemical etching",

abstract = "Pb(Mg1/3N2/3)O3-PbZrO3- PbTiO3 (PMN-PZT) ferroelectric electron emitters with a novel electrode structures were formed by photolithography and chemical etching to investigate their electron emission characteristics. For the electron emitter formed with the most suitable etching time, the electron emission density was 17 nC/ cm2. An electric potential distribution was simulated to clarify the effects of the vacuum gap, and results confirmed that the vacuum gap produces an electric field that leads electrons from the ferroelectric surface to the surrounding space.",

author = "Tomohiko Sugiyama and Iwao Ohwada and Tsutomu Nanataki and Yukihisa Moriguchi and Osamu Eryu and Masaya Ichimura and Manabu Gomi",

year = "2011",

month = may,

doi = "10.1116/1.3592993",

language = "English",

volume = "29",

journal = "Journal of Vacuum Science and Technology B",

issn = "2166-2746",

publisher = "AVS Science and Technology Society",

number = "3",

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TY - JOUR

T1 - Characteristics of PMN-PZT ferroelectric electron emitters with three-dimensional emission sites formed by chemical etching

AU - Sugiyama, Tomohiko

AU - Ohwada, Iwao

AU - Nanataki, Tsutomu

AU - Moriguchi, Yukihisa

AU - Eryu, Osamu

AU - Ichimura, Masaya

AU - Gomi, Manabu

PY - 2011/5

Y1 - 2011/5

N2 - Pb(Mg1/3N2/3)O3-PbZrO3- PbTiO3 (PMN-PZT) ferroelectric electron emitters with a novel electrode structures were formed by photolithography and chemical etching to investigate their electron emission characteristics. For the electron emitter formed with the most suitable etching time, the electron emission density was 17 nC/ cm2. An electric potential distribution was simulated to clarify the effects of the vacuum gap, and results confirmed that the vacuum gap produces an electric field that leads electrons from the ferroelectric surface to the surrounding space.

AB - Pb(Mg1/3N2/3)O3-PbZrO3- PbTiO3 (PMN-PZT) ferroelectric electron emitters with a novel electrode structures were formed by photolithography and chemical etching to investigate their electron emission characteristics. For the electron emitter formed with the most suitable etching time, the electron emission density was 17 nC/ cm2. An electric potential distribution was simulated to clarify the effects of the vacuum gap, and results confirmed that the vacuum gap produces an electric field that leads electrons from the ferroelectric surface to the surrounding space.

UR - https://www.scopus.com/pages/publications/79958159203

UR - https://www.scopus.com/pages/publications/79958159203#tab=citedBy

U2 - 10.1116/1.3592993

DO - 10.1116/1.3592993

M3 - Article

AN - SCOPUS:79958159203

SN - 2166-2746

VL - 29

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

IS - 3

M1 - 032210

ER -

Characteristics of PMN-PZT ferroelectric electron emitters with three-dimensional emission sites formed by chemical etching

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