Development of an automated X-ray inspection method for microsolder bumps

Atsushi Teramoto, Takayuki Murakoshi, Masatoshi Tsuzaka, Hiroshi Fujita

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

4 被引用数 (Scopus)

抄録

BOA, CSP, and flip-chip packages are widely used in printed circuit boards. These packages use an array of solder bumps as the electrical junction. To reduce the failures in manufacturing and after long-term use, solder bump inspection is strongly required for quality control. In this paper, we propose an automated inspection method for micro-solder bumps using an X-ray image. The thickness, area, volume, and void of the solder bumps were automatically inspected by this method. We introduced some correction techniques to reduce the effects of variation in the X-ray intensity and the spatial non-uniformity in the image. In this experiment, we evaluated accuracy and repeatability. The results demonstrated that the accuracy and repeatability met the requirement for online inspection. In conclusion, our automated method for inspecting micro-solder bumps may be useful in practice.

本文言語英語
ホスト出版物のタイトルProceedings - EMAP 2005
ホスト出版物のサブタイトル2005 International Symposium on Electronics Materials and Packaging
ページ21-26
ページ数6
DOI
出版ステータス出版済み - 2005
外部発表はい
イベントEMAP 2005: 2005 International Symposium on Electronics Materials and Packaging - Tokyo, 日本
継続期間: 11-12-200514-12-2005

出版物シリーズ

名前Proceedings - EMAP 2005: 2005 International Symposium on Electronics Materials and Packaging
2005

その他

その他EMAP 2005: 2005 International Symposium on Electronics Materials and Packaging
国/地域日本
CityTokyo
Period11-12-0514-12-05

All Science Journal Classification (ASJC) codes

  • 工学一般

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