@inproceedings{81f1f5bb92ab431ba01bceb7bbb6f3a0,
title = "Effects of surface treatments of 6H-SiC upon metal-SiC interfaces",
abstract = "A novel surface treatment was investigated in this study. Dipping 6H-SiC samples in boiling HF solution was performed to obtain clean and ordered surfaces The surfaces of the samples prepared by dipping in boiling HF and HF at room temperature were investigated by using Auger electron spectroscopy (AES), Coaxial impact-collision ion scattering spectroscopy (CAICISS), and X-ray photoelectron spectroscopy (XPS). From these surface analyses, it was found that the boiling HF treatment remove contamination composed of carbon and oxygen. The Effects of the boiling HF treatment on Current- Voltage characteristics of Al contacts are discussed.",
keywords = "AES, Aluminum, CAICISS, Contamination, Ohmic contacts, Surface treatment, XPS",
author = "K. Abe and M. Sumitomo and T. Sumi and O. Eryu and K. Nakashima",
note = "Publisher Copyright: {\textcopyright} (2002) Trans Tech Publications, Switzerland.; International Conference on Silicon Carbide and Related Materials, ICSCRM 2001 ; Conference date: 28-10-2001 Through 02-11-2001",
year = "2002",
doi = "10.4028/www.scientific.net/MSF.389-393.909",
language = "English",
isbn = "9780878498949",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "909--912",
editor = "S. Yoshida and S. Nishino and H. Harima and T. Kimoto",
booktitle = "Silicon Carbide and Related Materials 2001",
address = "Switzerland",
}