Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

Masato Futagawa; Shin Ogasahara; Tatsumi Ito; Mitsuru Komatsu; Yasushi Fuwa; Harutoyo Hirano; Ippei Akita; Kenichiro Kusano; Minoru Watanabe

doi:10.1109/TRANSDUCERS.2017.7994253

Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

Masato Futagawa
, Shin Ogasahara
, Tatsumi Ito
, Mitsuru Komatsu
, Yasushi Fuwa
, Harutoyo Hirano
, Ippei Akita
, Kenichiro Kusano
, Minoru Watanabe

研究成果: 書籍/レポートタイプへの寄稿 › 会議への寄与

1 被引用数 (Scopus)

抄録

A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.

本文言語	英語
ホスト出版物のタイトル	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	1136-1139
ページ数	4
ISBN（電子版）	9781538627310
DOI	https://doi.org/10.1109/TRANSDUCERS.2017.7994253
出版ステータス	出版済み - 26-07-2017
外部発表	はい
イベント	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, 台湾継続期間: 18-06-2017 → 22-06-2017

出版物シリーズ

名前	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

会議

会議	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
国/地域	台湾
City	Kaohsiung
Period	18-06-17 → 22-06-17

All Science Journal Classification (ASJC) codes

化学的な安全衛生
器械工学
電子工学および電気工学

文献へのアクセス

10.1109/TRANSDUCERS.2017.7994253

他のファイルとリンク

引用スタイル

Futagawa, M., Ogasahara, S., Ito, T., Komatsu, M., Fuwa, Y., Hirano, H., Akita, I., Kusano, K., & Watanabe, M. (2017). Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1136-1139). 記事 7994253 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994253

Futagawa, Masato ; Ogasahara, Shin ; Ito, Tatsumi その他. / Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1136-1139 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

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title = "Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics",

abstract = "A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 \% or less.",

author = "Masato Futagawa and Shin Ogasahara and Tatsumi Ito and Mitsuru Komatsu and Yasushi Fuwa and Harutoyo Hirano and Ippei Akita and Kenichiro Kusano and Minoru Watanabe",

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Futagawa, M, Ogasahara, S, Ito, T, Komatsu, M, Fuwa, Y, Hirano, H, Akita, I, Kusano, K & Watanabe, M 2017, Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994253, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers Inc., pp. 1136-1139, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, 台湾, 18-06-17. https://doi.org/10.1109/TRANSDUCERS.2017.7994253

Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. / Futagawa, Masato; Ogasahara, Shin; Ito, Tatsumi その他.
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1136-1139 7994253 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

研究成果: 書籍/レポートタイプへの寄稿 › 会議への寄与

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AU - Futagawa, Masato

AU - Ogasahara, Shin

AU - Ito, Tatsumi

AU - Komatsu, Mitsuru

AU - Fuwa, Yasushi

AU - Hirano, Harutoyo

AU - Akita, Ippei

AU - Kusano, Kenichiro

AU - Watanabe, Minoru

PY - 2017/7/26

Y1 - 2017/7/26

N2 - A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.

AB - A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.

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PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 18 June 2017 through 22 June 2017

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Futagawa M, Ogasahara S, Ito T, Komatsu M, Fuwa Y, Hirano H その他. Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1136-1139. 7994253. (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/TRANSDUCERS.2017.7994253

Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

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出版物シリーズ

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All Science Journal Classification (ASJC) codes

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