TY - JOUR
T1 - Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics
AU - Futagawa, Masato
AU - Ogasahara, Shin
AU - Ito, Tatsumi
AU - Komatsu, Mitsuru
AU - Fuwa, Yasushi
AU - Hirano, Harutoyo
AU - Akita, Ippei
AU - Kusano, Kenichiro
AU - Watanabe, Minoru
N1 - Funding Information:
This work was partially supported by JSPS KAKENHI Grant Number JP17K17785, JP24760277, Strategic Information and Communications R&D Promotion Program (SCOPE) of MIC within 2014–2016, and Fiscal 2014 Sekisui Chemical Grants for Research on Manufacturing Based on Innovations Inspired by Nature. The authors wish to acknowledge Dr. Kazuaki Sawada, Professor of Toyohashi University of Technology, for advice on sensor chip fabrication.
Publisher Copyright:
© 2018 Elsevier B.V.
PY - 2018/3/1
Y1 - 2018/3/1
N2 - A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.
AB - A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.
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U2 - 10.1016/j.sna.2017.12.022
DO - 10.1016/j.sna.2017.12.022
M3 - Article
AN - SCOPUS:85041211455
VL - 271
SP - 383
EP - 388
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
ER -