Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics

Masato Futagawa, Shin Ogasahara, Tatsumi Ito, Mitsuru Komatsu, Yasushi Fuwa, Harutoyo Hirano, Ippei Akita, Kenichiro Kusano, Minoru Watanabe

研究成果: Article査読

6 被引用数 (Scopus)

抄録

A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.

本文言語English
ページ(範囲)383-388
ページ数6
ジャーナルSensors and Actuators, A: Physical
271
DOI
出版ステータスPublished - 01-03-2018
外部発表はい

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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