Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics

Masato Futagawa; Shin Ogasahara; Tatsumi Ito; Mitsuru Komatsu; Yasushi Fuwa; Harutoyo Hirano; Ippei Akita; Kenichiro Kusano; Minoru Watanabe

doi:10.1016/j.sna.2017.12.022

Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics

Masato Futagawa
, Shin Ogasahara
, Tatsumi Ito
, Mitsuru Komatsu
, Yasushi Fuwa
, Harutoyo Hirano
, Ippei Akita
, Kenichiro Kusano
, Minoru Watanabe

研究成果: ジャーナルへの寄稿 › 学術論文 › 査読

13 被引用数 (Scopus)

抄録

A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.

本文言語	英語
ページ（範囲）	383-388
ページ数	6
ジャーナル	Sensors and Actuators, A: Physical
巻	271
DOI	https://doi.org/10.1016/j.sna.2017.12.022
出版ステータス	出版済み - 01-03-2018
外部発表	はい

All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
器械工学
凝縮系物理学
表面、皮膜および薄膜
金属および合金
電子工学および電気工学

文献へのアクセス

10.1016/j.sna.2017.12.022

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引用スタイル

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AU - Komatsu, Mitsuru

AU - Fuwa, Yasushi

AU - Hirano, Harutoyo

AU - Akita, Ippei

AU - Kusano, Kenichiro

AU - Watanabe, Minoru

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