Optical properties of amorphous carbon films implanted with nitrogen

K. Abe; O. Eryu

doi:10.1016/j.nimb.2005.08.133

Optical properties of amorphous carbon films implanted with nitrogen

K. Abe
, O. Eryu

研究成果: ジャーナルへの寄稿 › 学術論文 › 査読

12 被引用数 (Scopus)

抄録

Effects of nitrogen implantation on optical properties of amorphous carbon (a-C) films have been investigated. The optical (Tauc) gap of the films decreases with increasing ion dose due to structural modification during ion implantation. The photoluminescence (PL) spectrum for the as-deposited film has broad peak centered at 2.22 eV. Nitrogen irradiation leads to a blue shift of the PL peak and decrease of the PL peak width. The PL peak centered at 2.34 eV is obtained from the films implanted with nitrogen at the dose of 1 × 10¹⁵ cm^-2. Ion implantation can control PL properties of the films.

本文言語	英語
ページ（範囲）	637-639
ページ数	3
ジャーナル	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
巻	242
号	1-2
DOI	https://doi.org/10.1016/j.nimb.2005.08.133
出版ステータス	出版済み - 01-2006
外部発表	はい

All Science Journal Classification (ASJC) codes

核物理学および高エネルギー物理学
器械工学

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10.1016/j.nimb.2005.08.133

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title = "Optical properties of amorphous carbon films implanted with nitrogen",

abstract = "Effects of nitrogen implantation on optical properties of amorphous carbon (a-C) films have been investigated. The optical (Tauc) gap of the films decreases with increasing ion dose due to structural modification during ion implantation. The photoluminescence (PL) spectrum for the as-deposited film has broad peak centered at 2.22 eV. Nitrogen irradiation leads to a blue shift of the PL peak and decrease of the PL peak width. The PL peak centered at 2.34 eV is obtained from the films implanted with nitrogen at the dose of 1 × 1015 cm-2. Ion implantation can control PL properties of the films.",

keywords = "Amorphous carbon, Ion implantation, Optical gap, Photoluminescence",

author = "K. Abe and O. Eryu",

year = "2006",

month = jan,

doi = "10.1016/j.nimb.2005.08.133",

language = "English",

volume = "242",

pages = "637--639",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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TY - JOUR

T1 - Optical properties of amorphous carbon films implanted with nitrogen

AU - Abe, K.

AU - Eryu, O.

PY - 2006/1

Y1 - 2006/1

N2 - Effects of nitrogen implantation on optical properties of amorphous carbon (a-C) films have been investigated. The optical (Tauc) gap of the films decreases with increasing ion dose due to structural modification during ion implantation. The photoluminescence (PL) spectrum for the as-deposited film has broad peak centered at 2.22 eV. Nitrogen irradiation leads to a blue shift of the PL peak and decrease of the PL peak width. The PL peak centered at 2.34 eV is obtained from the films implanted with nitrogen at the dose of 1 × 1015 cm-2. Ion implantation can control PL properties of the films.

AB - Effects of nitrogen implantation on optical properties of amorphous carbon (a-C) films have been investigated. The optical (Tauc) gap of the films decreases with increasing ion dose due to structural modification during ion implantation. The photoluminescence (PL) spectrum for the as-deposited film has broad peak centered at 2.22 eV. Nitrogen irradiation leads to a blue shift of the PL peak and decrease of the PL peak width. The PL peak centered at 2.34 eV is obtained from the films implanted with nitrogen at the dose of 1 × 1015 cm-2. Ion implantation can control PL properties of the films.

KW - Amorphous carbon

KW - Ion implantation

KW - Optical gap

KW - Photoluminescence

UR - https://www.scopus.com/pages/publications/28544434172

UR - https://www.scopus.com/pages/publications/28544434172#tab=citedBy

U2 - 10.1016/j.nimb.2005.08.133

DO - 10.1016/j.nimb.2005.08.133

M3 - Article

AN - SCOPUS:28544434172

SN - 0168-583X

VL - 242

SP - 637

EP - 639

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 1-2

ER -

Optical properties of amorphous carbon films implanted with nitrogen

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