Quality improvement of X-ray Ct images by estimation of the mechanical misalignment in a projection image using an iterative method

Kenji Noguchi, Satoshi Takahashi, Daisuke Suzuki, Atsushi Teramoto

研究成果: Article

抜粋

An X-ray computed tomography (CT) apparatus is required for the inspection of semiconductor packages to detect fine voids with high accuracy. However, obtaining high-quality CT images stably is difficult because of object misalignment. In this paper, we propose a method for improving the X-ray CT image quality by estimating the mechanical misalignment of each projection image. The estimation is conducted by using an iterative method based on the characteristic features obtained from the reconstructed image. In experiments, we verified the effectiveness of proposed method by using projection images with simulated misalignments added. The results indicated that the proposed method may be useful for improving the quality of CT imaging.

元の言語English
ページ(範囲)213-219
ページ数7
ジャーナルIEEJ Transactions on Industry Applications
137
発行部数3
DOI
出版物ステータスPublished - 01-01-2017

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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